Linear Motors-Driven Large XY Θ Stages

With the development of increasingly large-scale and sophisticated liquid crystal and plasma displays, demand for manufacturing equipment that is capable of high-speed, highly accurate positioning and with large-stroke specifications has grown.
The linear motor directly driven large XYQ stage developed and commercialized by Proterial satisfies this demand and lays the groundwork for next-generation processing.

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Features

For a high system performance, there has to be total performance of the motor unit, which generates thrust, the motor control unit, and the stage unit, which makes possible high-accuracy operation. This fully integrated system has the following merits.

1High-speed, high-accuracy positioning: Because each axis is driven directly by a PM-type, direct current coreless coil motor using advanced rare-earth magnets, high-speed, high-accuracy positioning is possible even with long-stroke specifications. In addition, the system is simpler, smaller and lighter than others because it does not require a combination of coarse and delicate driving to achieve high speed without compromising accuracy.
2Low-noise, low-dust emission: Because stage construction does not use ball screws, a low-noise structure is possible. And because there is no rotary section, which can cause oil mist to be scattered, dust levels are also kept down.
3High reliability, low cost: Proterial standard linear motors are used in motor core sections with short delivery times.: Because reliability is high and parts are standardized, systems can be built very quickly and inexpensively.
4In the case of Proterial general-purpose motor control units, it is possible to rewrite control programs using a microcomputer. Units can be custom-built to meet a wide range of preferences, including low- to high-speed operating ranges to positioning and velocity stabilization applications.

Basic Specifications

Properties		Unit	Specification
Motor thrust, torque	X axial	N	200
	Y axial	N	300
	θ axial	N・m	50
Stroke	X axial	mm	1100
	Y axial		1600
	θ axial		±5
Load		N	588
Accuracy	X axial	μm	30
	Y axial	μm	30
	θ axial	μm	30
Repeatability	X axial	μm	±1
	Y axial	μm	±1
	θ axial	μm	±2
XY squareness	400×600	μm	25
Flatness		μm	40
Straightness	X axis: Vertical	μm	10
	Horizontal	μm	10
	Y axis: Vertical	μm	10
	Horizontal	μm	10
Pitching	X axial	μm	10
	Y axial	μm	10
Yawing	X axial	μm	10
	Y axial	μm	10